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| GMR Displacement Sensors | |
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A GMR displacement sensor consists of a position magnet and a GMR receiver. The permanent magnet sends magnetic field to the GMR receiver. The field intensity through the GMR sensor is a function of the distance between the magnet and receiver. The output signal of GMR sensor changes with the displacement when the position magnet moves. After analog signal processing the output voltage is propertional to the displacement. |
| Inductive Eddy Current Sensors | |
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An Eddy Current Sensorconsists of a ferrite U-core and a coil. The permeability of the device under test (DUT) is changed by applying a force/stress on the DUT. As result the impedance of the sensor coil changes with the force. The impedance change can be converted to a voltage change by using a measuring bridge.The force and stress applied on the DUT can be derived by the voltage measurement. The sensitivity and hysteresis depends on sensor geometry and the elektrical measuring conditions. The relation between the impedance and measurand of an optimized sensor is linear. The mean correlation coefficient is better than -0.996. The hysteresis of the loading and unloading curves is less than 3%. These sensors can be applied to force and stress measurement, and to bridge monitoring. They can also be used for Contactless Displacement Measurement in control engineering and vibration measurement of rotatory machines and nano-positioning etc. |
| Capacitive Sensors | |
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The simplest configuration of a capacitive sensor is two close-spaced parallel plates. The capacitance of the sensor is proportional to the area of the electrodes and the dielectric constant, and inversely related to the space between the parallel plates. Therefore motion, distance and position, dielectric constant etc. can be directly measured with a capacitive sensor. Capacitive sensors have a very high sensitivity. As motion detector a sensor can detect less than 10-10m displacements with good stability and high speed. They can be applied to the positioning of photolithography and the wafer-positioning in the semiconductor technology. Capacitive sensors can be integrated in accelerometer ICs with a sensitivity of about 1.5g, and find a lot of applications to the measurements of position/distance, vibration, pressure, liquid level etc. in control engineering. |
| Magnetoelastic Sensors | |
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A magnetoelastic Sensor works according to the magnetoelasticity of soft ferromagnetic materials. The permeability of a magnetoelastic tape is changed if a force/strain (wave or vibration) is applied to the magnetoelastic tape. The flux lines created by a bias-magnet changes with the permeability of the tape. An output voltage is generated in the detector coil. This signal is proportional to the intensity of the applied force/strain. Magnetoelastic sensors have a very high sensitivity. Strains less than 10 -10 can be detected with the small magnetoelastic sensors developed by ChenYang-ISM. Therefore,these sensors are suitable for vibration and knock (shock) sensor applications in automobile and mechanical eingineering. They can be applied to monitoring systems of machines and buildings, and to the detection of very weak seismic signals etc. |
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